Wet Benches and Cleanrooms

FM 4910 listed plastic materials for semiconductor wet benches and cabinets

The plastics used in wet benches and cabinets must be resistant to the aggressive chemicals used for etching and cleaning semiconductor wafers. They must also maintain extremely high levels of purity and not leech contaminates into process fluids. For some processes, the plastics must be able to operate safely and reliably at elevated temperatures.

Wet benches are assembled via thermoplastic welding. Consistent welding and fabrication characteristics as well as outstanding aesthetics are critical-to-quality for the plastic sheet materials used for these applications.

Plastic sheet, rod, and tube are used for the following applications in semiconductor cleanrooms:

  • Cabinets
  • Carts
  • Fume hoods
  • Furniture
  • Sinks
  • Tanks
  • Wet benches
  • Windows and guards
  • Workstations

Curbell supplies the PP, PVC, CPVC, and fluoropolymer materials shown below for semiconductor cleanroom wet benches and workstations. The best material for a wet bench application depends on the mechanical property requirements, the process chemicals, the operating temperature, the necessary flammability characteristics, and the level of purity required.

FM 4910 Listed Materials

The materials specified for cabinets and workstations in semiconductor cleanrooms are often required to meet Factory Mutual 4910 standards for fire propagation and smoke generation. Curbell’s FM 4910 listed products are as follows:

Simona’s FM 4910 Material Selection Chart and Vycom’s Flametec® Fire Safe Materials Chart compare the different types of FM 4910 listed plastic sheet materials.

High performance plastics used underground or in subsea systems, downhole or rigging operations, exploration, oil refining, or hydraulic fracturing.
Extreme temperatures and harsh environmental conditions Oil and gas exploration and production require materials that withstand extreme temperatures and harsh environments.

Fluoropolymers for Fluid Handling

Fluoropolymers including FEP, PFA, PTFE, ETFE, ECTFE, PCTFE, and PVDF are frequently used for fluid handling components in wet benches. Applications include:

  • Valves
  • Manifolds
  • Seals
  • Pumps
  • Filters
  • Sensors
  • Pipes
  • Fittings
  • Flexible tubing

Which plastic materials are right for your application? Contact us today.

Having difficulty determining which plastic materials are best for your semiconductor processing wet benches and cabinets? Whatever you need, our plastics experts are here for you—ready to answer your technical questions and discuss material options.

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Frequently Asked Questions
Does Curbell supply FM 4910 listed plastic materials for wet benches and cabinets?

Curbell supplies a number of FM 4910 listed plastic materials including certain grades of flame retardant polypropylene, PVC, CPVC, PVDF, PFA, and ECTFE.

Which plastic materials have the best chemical resistance?

PEEK, PVDF (Kynar®), ECTFE (Halar®), ETFE (Tefzel®), FEP, PTFE, and PFA all have broad chemical resistance and they are frequently used for wafer processing applications.

Which materials can be welded into cabinets and wet benches via thermoplastic welding?

Fluoropolymers (PVDF (Kynar®), ECTFE (Halar®), ETFE (Tefzel®), FEP, and PFA), vinyls (PVC and CPVC), and polyolefins (polyethylene and polypropylene) can all be assembled into cabinets and wet benches via thermoplastics welding.