The plastics used in wet benches and cabinets must be resistant to the aggressive chemicals used for etching and cleaning semiconductor wafers. They must also maintain extremely high levels of purity and not leech contaminates into process fluids. For some processes, the plastics must be able to operate safely and reliably at elevated temperatures.
Wet benches are assembled via thermoplastic welding. Consistent welding and fabrication characteristics as well as outstanding aesthetics are critical-to-quality for the plastic sheet materials used for these applications.
Plastic sheet, rod, and tube are used for the following applications in semiconductor cleanrooms:
- Fume hoods
- Wet benches
- Windows and guards
Curbell supplies the PP, PVC, CPVC, and fluoropolymer materials shown below for semiconductor cleanroom wet benches and workstations. The best material for a wet bench application depends on the mechanical property requirements, the process chemicals, the operating temperature, the necessary flammability characteristics, and the level of purity required.
FM 4910 Listed Materials
The materials specified for cabinets and workstations in semiconductor cleanrooms are often required to meet Factory Mutual 4910 standards for fire propagation and smoke generation. Curbell’s FM 4910 listed products are as follows:
Simona’s FM 4910 Material Selection Chart and Vycom’s Flametec® Fire Safe Materials Chart compare the different types of FM 4910 listed plastic sheet materials.
Fluoropolymers for Fluid Handling
Fluoropolymers including FEP, PFA, PTFE, ETFE, ECTFE, PCTFE, and PVDF are frequently used for fluid handling components in wet benches. Applications include:
- Flexible tubing
Which plastic materials are right for your application? Contact us today.
Having difficulty determining which plastic materials are best for your semiconductor processing wet benches and cabinets? Whatever you need, our plastics experts are here for you—ready to answer your technical questions and discuss material options.
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